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| Journal Abbr. | Microelectron Eng |
| Web of Sciences Category | |
| Print ISSN | 0167-9317 |
| E-ISSN | 1873-5568 |
| NLM Catelog ID | 101552621 |
| Scopus Source ID | 26696 |
| Country | NETHERLANDS |
| Language | English |
| Publisher | Elsevier |
| Publisher Address | Radarweg 29, Amsterdam, Netherlands, 1043 Nx |
