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Jan, 2024;20 (2): e2304555.

Ultrathin Serpentine Insulation Layer Architecture for Ultralow Power Gas Sensor.

Sung-Ho Kim, Min-Seung Jo, Kwang-Wook Choi, Jae-Young Yoo, Beom-Jun Kim, Jae-Soon Yang, Myung-Kun Chung, Tae-Soo Kim, Jun-Bo Yoon
Author Information
  1. Sung-Ho Kim: School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
  2. Min-Seung Jo: School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
  3. Kwang-Wook Choi: Samsung Electronics Co., Ltd., 1, Samsungjeonja-ro, Hwaseong-si, Gyeonggi-do, 18448, Republic of Korea.
  4. Jae-Young Yoo: Center for Bio-Integrated Electronics, Northwestern University, Evanston, IL, 60208, USA.
  5. Beom-Jun Kim: School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
  6. Jae-Soon Yang: School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
  7. Myung-Kun Chung: School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
  8. Tae-Soo Kim: School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
  9. Jun-Bo Yoon: School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea. ORCID
PMID: 37649204 DOI: 10.1002/smll.202304555

Abstract

Toxic gases have surreptitiously influenced the health and environment of contemporary society with their odorless/colorless characteristics. As a result, a pressing need for reliable and portable gas-sensing devices has continuously increased. However, with their negligence to efficiently microstructure their bulky supportive layer on which the sensing and heating materials are located, previous semiconductor metal-oxide gas sensors have been unable to fully enhance their power efficiency, a critical factor in power-stringent portable devices. Herein, an ultrathin insulation layer with a unique serpentine architecture is proposed for the development of a power-efficient gas sensor, consuming only 2.3 mW with an operating temperature of 300 °C (≈6% of the leading commercial product). Utilizing a mechanically robust serpentine design, this work presents a fully suspended standalone device with a supportive layer thickness of only ≈50 nm. The developed gas sensor shows excellent mechanical durability, operating over 10 000 on/off cycles and ≈2 years of life expectancy under continuous operation. The gas sensor detected carbon monoxide concentrations from 30 to 1 ppm with an average response time of ≈15 s and distinguishable sensitivity to 1 ppm (ΔR/R0 = 5%). The mass-producible fabrication and heating efficiency presented here provide an exemplary platform for diverse power-efficient-related devices.

Keywords

metal-oxide gas sensors nanowires power efficiency ultrathin supportive layers

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Grants

  1. 2021M3H4A1A02050234/National Research Foundation of Korea
  2. 2022R1A2C2010714/National Research Foundation of Korea
Journal Article

Word Cloud

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